Past Event Overview

SPIE Scanning Microscopies, a multidisciplinary conference for advancing scanning microscopy technologies and applications. This event brings microscopists from all phase of scanning microscopies (from scanned optics to scanned particle beams) together in a single forum to discuss current research and new advancements in the field.

Review the 2015 Program
News and photos
Final Technical Program (3 MB PDF)
Technical Abstracts (1 MB PDF)
2015 Keynote Presentation

Lithography and Mask Challenges at the Leading Edge

Harry J. Levinson 
Sr. Director Technology Research
GLOBALFOUNDRIES 

2015 Topics
Optical, Particle Beam (ion and electron), and Scanned Probe
Forensics
Biological and Pharmaceutical
Food Analysis: Microstructure, Identification, and Counterterrorism
Environment, Health, and Safety
Nanofabrication and Nanolithography
Photomask Imaging, Metrology, and Characterization
Nanomaterials
Instrument Calibration, Evaluation, and Standards
Industrial Semiconductor Applications
Co-located with SPIE Photomask Technology 2015
SPIE Scanning Microscopies is co-located with SPIE Photomask Technology 2015, the premier worldwide technical meeting for the photomask industry. Two conferences for one registration, plus access to multidisciplinary connections and information.
SPIE Photomask Technology
Monterey Conference Center and Monterey Marriott
Monterey, California, United States
29 September - 1 October 2015