Past Event Overview

SPIE Advanced Lithography, 23 - 27 February 2014, the premier conference for the lithography community. For 38 years, SPIE has brought together this community to address challenges presented in fabricating next-generation integrated circuits.

See what happened: onsite news and photos


 

Technical Program (PDF 6 MB)

Technical Abstracts (PDF 2 MB)

Exhibition Guide (PDF 4 MB)

2014 Plenary Speakers
 

My Year as SPIE President: What Does the Society Do and Who Makes It Happen?

William H. Arnold
Chief Scientist and VP of Technology Development Center, ASML
2013 SPIE President
 

Making the Impossible: Dealing with Patterns Throughout the Design and Manufacturing Flow

Joseph Sawicki
VP and GM, Design-to-Silicon Division,
Mentor Graphics Corp.
 

Beyond Scaling: Opportunities and Approaches

Akihisa Sekiguchi
Corporate VP and Deputy General Manager,
Tokyo Electron Ltd.

Plenaries sponsored by: